Shaft portion of an apparatus for holding and heating semiconductor wafers or the like



FIG. 1 is a perspective view of a shaft portion of an apparatus forholding and heating semiconductor wafers or the like;

FIG. 2 is a front view thereof, a rear view being the same image of afront view;

FIG. 3 is a right side view thereof, a left side view being the sameimage of a right side view;

FIG. 4 is a bottom plan view thereof; and,

FIG. 5 is a sectional view taken vertically at the center of the portionshown by 5—5 in FIG. 2.

The broken lines showing on the drawing disclosure are for illustrativepurposes only and form no part of the claimed design. The linesconsisting of long lines and dots indicate conceptual border linesbetween the claimed portions and the disclaimed portions.

The ornamental design for a shaft portion of an apparatus for holdingand heating semiconductor wafers or the like, as shown and described.